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HORIBA SEC-4400Á÷Á¿¿ØÖÆÆ÷
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SEC-4400
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0.00
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316L²»Ðâ¸Ö²ÄÖÊ.
5 sccm-100 slmÁ÷Á¿
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Model |
SEC-4400 |
SEC-4500 |
SEC-4550 |
SEC-4600 |
Standard Flow Range(N2 Eq.) |
5 sccm ~ 8 slm |
10 ~ 30 slm |
31 ~ 50 slm |
51 ~ 100 slm |
Wetted Materials |
M (metal) -Type: SUS-316L-R (viton) type |
Valve Piezo Valve |
(Normal Close or Normal Open) |
Flow Control Range |
2 ~ 100% F.S. |
Accuracy |
¡À 1% F.S. |
Response |
<1.0sec. (500ms typical) |
Linearity |
¡À 0.5% F.S. |
Repeatability |
¡À 0.2% F.S. |
Operating Pressure |
14 ~ 42 psi |
21 ~ 42 psi |
Leak Integrity |
M-Type: 5x10 -10 Pa¡¤m ³/s(He) or less |
Operating Temperature |
5 ~ 50 ¡ãC (Accuracy guaranteed 15 ~ 35 ¡ãC) |
Flow Rate Setting Signal |
0.1 ~ 5VDC |
Flow Rate Output Signal |
0 ~ 5VDC |
Power Supply |
¡À 15VDC ¡À 5% 60mA |
Standard Fitting |
1/4¡± VCR, 1/4¡± Swagelok |
3/8¡±VCR,3/8¡±Swagelok |
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